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1. Visual Inspection: Visual inspection is the basic method to detect potential defects on the surface of the semiconductor integrated circuit package. This method involves examining the package under magnification for any physical damage or irregularities.
2. X-ray Inspection: X-ray inspection can reveal internal defects within the semiconductor integrated circuit package that are not visible to the naked eye. This method is useful for identifying issues such as wire bonding or delamination.
3. Scanning Electron Microscope (SEM) Analysis: SEM analysis provides high-resolution images of the surface of the semiconductor integrated circuit package, allowing for detailed examination of its features and potential defects.
4. Optical Microscopy: Optical microscopy is used to inspect the surface of the semiconductor integrated circuit package at high magnification, enabling the detection of small defects or anomalies.
5. Fourier Transform Infrared (FTIR) Spectroscopy: FTIR spectroscopy can be used to analyze the material composition of the semiconductor integrated circuit package, helping to identify contaminants or abnormalities.
6. Thermogravimetric Analysis (TGA): TGA is a method used to analyze the thermal stability and composition of materials in the semiconductor integrated circuit package through monitoring weight changes as a function of temperature.
7. Energy-Dispersive X-ray Spectroscopy (EDS): EDS is a technique that can provide elemental analysis of the materials present in the semiconductor integrated circuit package, aiding in the identification of impurities or material defects.
8. Scanning Acoustic Microscopy (SAM): SAM uses sound waves to inspect the internal structure of the semiconductor integrated circuit package, detecting defects such as voids, delamination, or cracks.
9. Atomic Force Microscopy (AFM): AFM is a high-resolution imaging technique that can be used to analyze the surface topography of the semiconductor integrated circuit package, identifying structural abnormalities or defects.
檢測(cè)流程步驟
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